JPH0161229B2 - - Google Patents

Info

Publication number
JPH0161229B2
JPH0161229B2 JP58045064A JP4506483A JPH0161229B2 JP H0161229 B2 JPH0161229 B2 JP H0161229B2 JP 58045064 A JP58045064 A JP 58045064A JP 4506483 A JP4506483 A JP 4506483A JP H0161229 B2 JPH0161229 B2 JP H0161229B2
Authority
JP
Japan
Prior art keywords
excitation
excitation coil
sample
magnetic pole
lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58045064A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59171442A (ja
Inventor
Katsushige Tsuno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP58045064A priority Critical patent/JPS59171442A/ja
Priority to US06/584,712 priority patent/US4585942A/en
Publication of JPS59171442A publication Critical patent/JPS59171442A/ja
Publication of JPH0161229B2 publication Critical patent/JPH0161229B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H01J37/141—Electromagnetic lenses

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
JP58045064A 1983-03-17 1983-03-17 電子顕微鏡等の対物レンズ Granted JPS59171442A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP58045064A JPS59171442A (ja) 1983-03-17 1983-03-17 電子顕微鏡等の対物レンズ
US06/584,712 US4585942A (en) 1983-03-17 1984-02-29 Transmission electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58045064A JPS59171442A (ja) 1983-03-17 1983-03-17 電子顕微鏡等の対物レンズ

Publications (2)

Publication Number Publication Date
JPS59171442A JPS59171442A (ja) 1984-09-27
JPH0161229B2 true JPH0161229B2 (en]) 1989-12-27

Family

ID=12708919

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58045064A Granted JPS59171442A (ja) 1983-03-17 1983-03-17 電子顕微鏡等の対物レンズ

Country Status (1)

Country Link
JP (1) JPS59171442A (en])

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6624426B2 (en) * 2000-12-11 2003-09-23 Schlumberger Technologies Inc. Split magnetic lens for controlling a charged particle beam
WO2018189850A1 (ja) * 2017-04-13 2018-10-18 株式会社 日立ハイテクノロジーズ 電子顕微鏡

Also Published As

Publication number Publication date
JPS59171442A (ja) 1984-09-27

Similar Documents

Publication Publication Date Title
Telieps et al. An analytical reflection and emission UHV surface electron microscope
JP3885334B2 (ja) 微分干渉顕微鏡
JPS6257062B2 (en])
JPH0161229B2 (en])
US6720558B2 (en) Transmission electron microscope equipped with energy filter
JPH02816B2 (en])
US6140645A (en) Transmission electron microscope having energy filter
US3737659A (en) Field of view adjusting device
US4585942A (en) Transmission electron microscope
US3978338A (en) Illumination system in a scanning electron microscope
TWI288423B (en) Lens arrangement comprising a laterally displaceable optical axis for particle beams
JPH0992191A (ja) 電子顕微鏡
JPS6063866A (ja) 電子顕微鏡等の対物レンズ可動絞り装置
JP2561739B2 (ja) 電子顕微鏡のレンズ装置
JPS5760648A (en) Electron microscope
US6586737B2 (en) Transmission electron microscope equipped with energy filter
JP2001291486A (ja) エネルギーフィルタを備えた透過型電子顕微鏡
JPS605503Y2 (ja) 透過型走査電子顕微鏡
JP2886168B2 (ja) 電子線装置
JPH0136284Y2 (en])
JPS6328518Y2 (en])
JP4676209B2 (ja) 電子レンズ及びこれを用いた荷電粒子線装置
JPH095805A (ja) 集光レンズ
JPH0828200B2 (ja) 電磁型レンズ
JP2004335433A (ja) 収差補正電子光学装置